Fastmicro Surface Particle Sampler
Surface particle measurement at microscale.
Fastmicro Sampler of 20mm diameter processed in seconds on FM Sample Scanner
>90% Pick-up efficiency | >90% Repeatability
Particle sampling and detection from 0.5 µm size PSL equivalent particles
FAST
QUANTITATIVE
EASY TO OPERATE
ACCURATE
CONSISTENT
HIGH THROUGHPUT
Instruction: Fastmicro Sampler
Fastmicro Sampler
Surface particle measurement at microscale.
Submicron Particle Sampling
The Fastmicro Sampler ' is a surface particle contamination inspection tool for indirect measurements of particle count, size and location down to 0.5 micrometer particles. These 'tape-lift' samplers enable flexible sampling on a variety of surfaces, including those that are difficult to reach or are unusually rough, without leaving any measurable residue.
The versatility makes the sampler suitable to test diverse situations across various industries, providing robust measurements and valuable insights into contamination levels
Disclaimer: For ASML Grade 1 product qualification, Particle Measurement Cards (PMCs) are the released solution used with the Fastmicro Sample Scanner.
Sampler Applications
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CLEANING
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