FM-PR-PDS 

Manual and Automated loader

Datasheet


Get access to the comprehensive Pellicle | Reticle Particle Defect Inspection System by filling out the form below. Enter your details, and we’ll send the datasheet directly to your inbox.


Submit Request

Thank You.

You will receive an email shortly. Please check your inbox to download the Pellicle | Reticle Particle Defect Inspection System. In the meantime, we invite you to explore our website.

Fastmicro PR-PDS

  • Fast: imaging in seconds on large surfaces
  • Quantified: fit for qualification and monitoring in both production and an R&D environment
  • Easy to operate: operator independent, even automated and clean handling; the product stays clean: no contact, no contamination
  • Accurate: high-resolution measurement (quantity,
  • position, size)
  • Consistent: objective measurements, time after time
  • High throughput: processing within a minute