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Particle measurement 

at microscale

Cleanliness Control

Our Solutions  
Contact Us​​  ​​

Confidence in Particle Contamination Control

Fastmicro provides surface particle measurement solutions according to ISO14644-9 and ISO14644-17 and other related high-purity standards for sub-micrometer technical cleanliness control. Our product solutions deliver six key benefits to ensure quantitative, consistent, repeatable, and qualified results.

FAST

QUANTITATIVE

EASY TO OPERATE

ACCURATE

CONSISTENT

HIGH THROUGHPUT

Particle Detection Systems

Discover our range of particle counting systems designed for surface particle detection and deposition rate monitoring at sub-micrometer levels across various microtechnology industries and accomplish breakthroughs in cleanliness control with fast, accurate and quantitative surface particle measurements. We enable you to take reliable decisions on where and how to improve cleanliness processes and deliver consistent quality products. And ultimately, reach high-end equipment performance for your end users, improving process quality, manufacturing yield and minimizing product failures.

Sampler Scanner

Measure sub-micrometer surface particle contamination levels from 0.5 um and larger, according to ISO 14644-9 and other standards. Scan indirect particle contamination 'tape-lift' samples from diverse product surfaces and assemblies in seconds.

Learn more  



Fallout Scanner

Monitor particle deposition rates at sub-micrometer levels from 0.5 um and larger, according to ISO 14644-17, in real-time and at the same cleanliness levels as your cleanroom classification. Integrate the high-vacuum Fallout Scanner as OEM module to monitor particle deposition inside a tool.

Learn more  





Defect Inspection System

Multi-application Particle Defect Inspection System creates breakthroughs in top- and bottom-side simultaneous high-throughput particle inspection. Detection of 100 nm particles and up on Si, GaN,  Compound and Glass Wafers, EUV Pellicles and Reticles. Manual and Automated tools available

Learn more  

Fastmicro has transformed our inspection capability business significantly. Before migration to this new inspection tool, we saw a 50% variation in the particle count measurements. This is now reduced to less than 10% in combination with a particle detection limit that went down significantly by more than one order of magnitude to 0.5 micrometer. We have confidence in the Fastmicro scanner to help us with finding an excellent quantification of the surface cleanliness of critical parts.


As valued customer, I know that the integration of Fastmicro has allowed us to reach our required machine defectivity performance.

Besides accurate measurements, the tool offers ease of use and high throughput features. We appreciate the professional service and collaboration with Fastmicro to extend the capabilities of the tool further in the future.

__

Dr. Ir. L.H.A. Leunissen | ASML , cleanliness project manager                                                                                                         Learn more  

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Fastmicro SCP Grade Level Particle Calculator

At Fastmicro, we believe you can accomplish breakthroughs in cleanliness control with fast, accurate and quantitative surface particle measurements. We help our customers to overcome today’s cleanliness challenges in microtechnology by sharing our knowhow and experience.


With the Fastmicro SCP Grade Particle Calculator we enable you to take reliable decisions on where and how to improve cleanliness processes and deliver consistent quality products. And ultimately, reach high-end equipment performance for your end users. Utilize this versatile online tool and downloadable report to simplify complex particle concentration level calculations and corresponding SCP Grade levels according to the ISO 14644-9 standard. Take the step to quantify your particle inspection to understand particle contamination levels and streamline effective decision-making in cleanliness control!

Calculate Particles Online. Easily and Free

 Immediate Evaluation of Results:

Quickly determine the SCP Grade of your samples using the real-time output for efficient particle contamination reporting.


 Free and Accessible:

This free and online tool makes advanced particle calculations accessible to all, reducing your time to generate useful information.


 Versatile Measurement Input:

Allows for multiple input parameters, like sample surface area, total particle count and concentration, providing for versatile particle contamination calculations.


Start Calculate 

Are you ready to level-up in cleanliness control?​

Contact us to start taking particle measurements in seconds.

Contact Us Now  

Knowledge Center

Stay informed with our Knowledge Center, featuring blogs, events, how-to videos, and use cases focused on the latest advancements and practices in particle measurement and contamination control.

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About us

Fastmicro enables process quality engineers to make reliable particle contamination control decisions on where and how to improve their cleanliness processes and deliver consistent quality products. And ultimately, achieve leading-edge equipment performance for their end users.



We help with reducing yield losses and keeping up with ever-increasing cleanliness requirements.

Connect with us
  • info@fast-micro.com
  • 31 (0)40 285 41 88  
  •      Spaarpot 3
  •        5667 KV Geldrop
  •        The Netherlands 
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