| PARTICLE COUNTERS
Particle Deposition Rate Monitoring.
Monitor particle deposition rates at sub-micrometer levels in real-time and at the same cleanliness levels as your cleanroom classification.
Particle Deposition Rate Monitoring
Ambient
Particle Fallout Scanner
Monitor real-time particle deposition rates at sub-micrometer levels from 0.5 um and larger, according to ISO 14644-17.
High Vacuum
Particle Fallout Scanner
Integrate the high-vacuum Fallout Scanner as OEM module to monitor particle deposition inside a tool.
FAST
QUANTITATIVE
EASY TO OPERATE
ACCURATE
CONSISTENT
HIGH THROUGHPUT
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