Particle Deposition Rate Monitoring

High Vacuum PFS
Integrate the high-vacuum Fallout Scanner as OEM module to monitor particle deposition inside a tool.

Particle Fallout Scanner
Monitor particle deposition rates at sub-micrometer levels in real-time and at the same cleanliness levels as your cleanroom classification.

FAST

QUANTITATIVE

EASY TO OPERATE

ACCURATE

CONSISTENT

HIGH THROUGHPUT
Contact us
about anything related to our Particle Deposition Rate Monitor.