Particle Deposition Rate Monitoring

Particle Fallout Scanner
Monitor particle deposition rates at sub-micrometer levels in real-time and at the same cleanliness levels as your cleanroom classification.

High Vacuum PFS
Integrate the high-vacuum Fallout Scanner as OEM module to monitor particle deposition inside a tool.

FAST

QUANTITATIVE

EASY TO OPERATE

ACCURATE

CONSISTENT

HIGH THROUGHPUT
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