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Fastmicro Cleanliness 
Norms and Standards

We strive to meet and exceed the needs and expectations of our customers. We align the activities of all personnel with the common focus of customer satisfaction through continual improvement in the quality of our products and services.


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Particle measurement according to norms and standards

Fastmicro products conform to particle measurement and cleanliness control, according to the norms and standards. Our commitment is reflected in our stringent quality policies and the rigorous certification of our products and processes.

Norms and Standards

ASML GSA 07 9410 Cleanliness

Particles: Grade 1

IMS Nanofabrication 120947085-08 Cleanliness requirements for parts & assemblies: PC3 & PC4

ISO 14644-17:2021 - Particle deposition rate applications

ISO 14644-9:2022 - Assessment of surface cleanliness for particle concentration


SEMI E195-0925 - Test Method Using Adhesive Replacement Substrates to Assess Particulate Surface Contamination on Critical Chamber Components


NASA 19960044619 - Contamination control engineering design guidelines for the aerospace community


ESA ECSS-Q-ST-70-01C Rev.1 – Cleanliness and contamination control (15 October 2025)


IEST STD-CC1246E - Product Cleanliness Levels - Applications, Requirements, and Determination

IEST-RP-CC005: Gloves and Finger Cots Used in Cleanrooms and Other Controlled Environments



ASTM E1216-21 – Standard Practice for Sampling for Particulate Contamination by Tape Lift



Contact Us to Learn More

If you have questions about our quality policies or need more information on our certifications, please reach out to us. Our team is ready to provide all the necessary details and support to help you understand the scope and implications of our compliance with standards and norms. Contact us today to learn more about how our commitment to quality ensures the best outcomes for your needs.


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About us

Fastmicro enables process quality engineers to make reliable particle contamination control decisions on where and how to improve their cleanliness processes and deliver consistent quality products. And ultimately, achieve leading-edge equipment performance for their end users.



We help with reducing yield losses and keeping up with ever-increasing cleanliness requirements.

Connect with us
  • info@fast-micro.com
  • 31 (0)40 285 41 88  
  •      Spaarpot 3
  •        5667 KV Geldrop
  •        The Netherlands 
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