| PARTICLE COUNTERS


Particle Defect Inspection System.


Our Systems 

The Fastmicro Particle Defect Inspection System has been developed to measure surface particle contamination levels directly on a product’s surfaces in any industry down to 100 nm Lower Detection Limit (LDL) at very fast throughput speeds. The primary applications are in Semiconductor (pellicles, reticles, wafers) and the display market. The scanning area is expandable to very large surfaces, like LCD substrates due to its modular and scalable design.


The scanner module is also available as a white label OEM solution for system integrators.

Particle Defect Inspection Systems

8-inch Manual

FM-WM8-PDS-V01

Configurable substrate sizes: 
100 / 150 / 200 mm

Manual loader

Footprint:
1335x660x2047mm [LxWxH]

8-inch Automated

FM-WA8-PDS-V01

Configurable substrate sizes:
100 / 150 / 200 mm

2 integrated Cassette Stations or SMIF's

Footprint:
1335x1320x2047mm [LxWxH]

12-inch Manual

FM-WM12-PDS-V01

Configurable substrate sizes:
150 / 200 / 300 mm

Manual loader

Footprint
1602x755x2099mm [LxWxH]



12-inch Automated

FM-WA12-PDS-V01

Configurable substrate sizes:
150 / 200 / 300 mm

2 FOUP loaders

Footprint
1510x1602x2099mm [LxWxH]

​The Fastmicro Particle Defect Inspection System Applications

PDS can be used for particle measurements on:


  • Replace multiple legacy systems for one; save floorspace
  • Top- and bottom-side inspection without flipping
  • 4 / 6 / 8/ 12-inch Si, SiC, GaN, Glass, Sapphire and Compound Wafers (backside, blanks, bevels)
  • For photomask: pellicles, reticles (front and backside)
  • 3Di Advanced Packaging (e.g. hybrid bonding)
  • No moving parts: clean and robust
  • Pre-scan to accelerate workflow for further particle analysis
  • Manual and Automated up to 12-inch wafers
  • High Purity Critical parts
High Purity Critical parts
3Di 
 copper to copper

WAFERS
backside blanks bevels

RETICLES
photomasks backside

PELLICLES
front and backside

FAST

QUANTITATIVE

EASY TO OPERATE

ACCURATE

CONSISTENT

HIGH THROUGHPUT

Contact us 

about anything related to our Particle Defect Inspection Systems.