2-inch Witness
Wafer Particle Traps
Measure sub-micrometer particle deposition at multiple clean room locations
Deposition rate monitoring according to to ISO standards 14644-9 and 14644-17
90% cumulative particle count
Detection Rage from 0.5 µm PSL particles
FAST
QUANTITATIVE
EASY TO OPERATE
ACCURATE
CONSISTENT
HIGH THROUGHPUT
Particle deposition rate monitoring using witness wafers and particle traps
The Fastmicro Fallout Scanner has been developed to measure the particle deposition rate in any industry. It can be used in both vacuum as well as ambient environments.
The scanner module is also available as a white label solution for system integrators.
Continuously measure where and when it matters.
The Fastmicro Fallout Scanner offers particle deposition rate monitoring with intervals in seconds.
The particle deposition rate can be accurately measured starting at particles of just 0.5 µm.
Combined with the easy-to-use software, we help our customers to view cleanliness measurements on surfaces instead of airborne-only. Not all particles remain airborne, as they could deposit on critical surfaces, impacting technical cleanliness.
With the Particle Fallout Scanner, the actual deposition rate becomes clear and can be used for further cleanliness improvement.
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about anything related to our Witness Wafer Kit.