Fastmicro Sample Scanner,

a Particle Size Analyzer


  Surface Particle Cleanliness Testing at microscale.

  Detection from 0.5 µm size PSL equivalent particles

  Surface Particle Size Analysis according to ISO 14644-9

  >90% Pick-up efficiency | >90% Repeatability | Results in Seconds


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Particle Size Analyzer

The Fastmicro Sample Scanner is an inspection tool for indirect Surface Particle Measurement contamination down to 0.5 micrometer particles using innovative 'tape-lift' samplers. Quick and efficient, the Particle Size Scanner analyzes samples within seconds over a sample area of 225 mm², ensuring immediate and accurate results.


The versatility of the Sample Scanner is enhanced with different sampler options, including the card sampler holder for indirect measurements and the 1” wafer holder for fallout measurements. This adaptability makes it suitable to test diverse situations across various industries, providing robust measurements and valuable insights into contamination levels.

Cleanroom Particle Counter: Fastmicro Sample Scanner Applications

EQUIPMENT
ASSEMBLIES
PARTS
CLEANING

Particle Measurement: Workflow for the Fastmicro Sample Scanner

Particle Size Analysis on parts and in assemblies is possible on flat, curved and cavity surfaces

1. Particle Sampling with PMC       

2. Particle Measurement and Detection  

3. Particle Counter, Particle Size and Position in Seconds   

Are you ready for the next step in Particle Size Analysis?

Contact us and make your Particle Measurement in seconds.

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Particle Counter: Sample Scanner Specifications

Fast and High Production Throughput

  • Imaging in seconds; processed in seconds for 225 mm² 
  • Operator workflow in less than a minute

Data Output

  • Analysis: Particle Quantity, Particle Position and Particle Size
  • Annotated image with Particle Detection overlay, plus ‘3D’ signal representation of any operator-selected particle
  • Reporting: export function including KLARF and Excel Files (including standard bin sizes)
  • Optional qualification report in UI and PDF, according to ISO standard 14644-9
  • Data exchange via USB, or via an optional ethernet connection (f.e. connected to database through XML)

Easy to Operate

  • Fit for use by operators in manufacturing and R&D environments.

Particle Detection Range

  • 0.5 µm PSL particles and up

Reproducibility

  • 90% cumulative Particle Count, when replacing a sampler, with PSL particles from 0.5 µm 
  • Repeated result between scanners

Particle Sizing accuracy

  • Within 20%with PLS particles

Nondestructive – no cross contamination to samples

  • Nondestructive measurement and sample can be remeasured
  • No contact with sample measurement area
  • No cross-contamination due to sampler
  • No particle generation by the scanner in the measurement area (no moving parts)

Requirements on sampler and sample handling

  • Above scanner requirements can only be achieved with the use of certified samplers, fallout holders and direct measured products
  • Sampler contamination levels must at least be 10 times lower than the qualification level of the customer
  • Combined use in clean environment, i.e. cleanroom ISO 7, Class 10,000 or better
  • Card sampler holder for indirect measurements is included, fit for Particle Measurement Cards (PMC 2.0 in a box, as certified by partner)
  • Optional with 1” wafer holder, for particle fallout measurements

Size & weight

  • Scanner size 615 x 300 x 460 mm, weight 16 kg
  • Transport packaging: size 710 x 530 x 670 mm, weight 45 kg

Model

  • FM-PS-SAS-V01

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